A combined profilometer combined atomic force probe scanning measurement with non-con-tact optical measurement based on one interference microscope substrate was developed for ultra-preci-sion surface topography. The white light interference microscope based atomic force probe scanning measurement, the relationship between the deflection of an atomic force probe cantilever and the movement amount of interference fringes and the nonlinearity error correction method of probe cantilever deflection measurement were given. Then, the contact operation mode combined the displacement of vertical scanning system and the deflection of the cantilever was analyzed. A 3D precision displacement system and a AFM head based on white light interference microscope were developed. Under the same condition, the calibration grating TGZ2_PTB(107±2nm) made by NT-MDT Co. , was measured 10 times on the same region. The measurement results show that the standard deviation is 0.96 nm and the relative repeatability error is 3.08％. Several examples measured by atomic force probe scanning method, phase-shifting interferometry and vertical scanning white light intcrfercnce method were given, respectively. It concludes that the combined profilometer can be used to measure ultraprecision machining engineering surfaces, optical surfaces,and micro-nano geometric structures.%研制了基于同一显微镜基体实现原子力探针扫描测量与非接触光学测量两种功能的复合型超精密表面形貌测量仪.分析了基于白光显微干涉原子力探针的测量方法、探针微悬臂变形量与白光干涉条纹移动量的关系以及探针微悬臂测量非线性误差的修正方法,和通过融合垂直扫描系统的位移量和悬臂梁变形量得到了原子力探针的工作方式.研制了三维精密位移系统和基于白光显微干涉的原子力探针测头.采用原子力探针扫描测量对NT-MDT公司生产的扫描探针校准光栅TGZ2_PTB进行了重复性实验,实验显示标准差为0.96 nm,相对重复性误差为3.08%.给出了原子力探针扫描测量、相移干涉测量及白光干涉垂直扫描测量的测量实例.实验结果表明,所研制的超精密表面形貌测量仪可用于超精密加工工程表面、光学表面以及微纳几何结构的测量.
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