一种周向精度检测系统的误差分析及修正算法

摘要

To meet the demands for circular feed accuracy measuring of precision CNC machine tools with rotary shaft, the principle of circular feed accuracy measuring system based on direct drive servomotor and laser interferometer is given, which is suitable for both circular indexing precision and dynamic accuracy measuring. For impro- ving the accuracy of the measuring system, an optical path difference observation model is proposed by multi-body system theory after the measuring principle is analyzed; the influencing factors on errors are analyzed; a self-cali- bration algorithm and a modified transformation model based on the observation model is given. Optical path differ- ence simulation model is established for the measuring system based on geometrical optical and multi-body systems theory, and the observation model and the self-calibration algorithm are verified by simulation.%针对具有回转轴的精密数控机床周向进给精度检测要求，给出了基于直驱动电机和激光干涉仪的一种周向精度检测系统的原理，该系统可用于周向分度及动态精度的检测。为提高该测量系统的测量精度，在检测原理分析基础上运用多体系统理论建立了光程差观测模型并分析了误差影响因素及其影响，给出了基于观测模型的自标定算法及修正转换模型。采用几何光学及多体系统理论建立了该测量系统的光程差仿真模型，应用该模型对观测模型及自标定算法进行了仿真分析，表明了其正确性。