带有旁路微流道的改进型电共轭流体射流发生器

摘要

In order to solve the serious pressure-drop problem of a common ECF (electro-conjugate fluid) jet generator when its output flow is small and also to improve its output performance,the structural optimization of the flow channel layer of the ECF jet generator is conducted.First,based on the principles of ion drag pumping and conduction pumping,the improved ECF jet generator's design is theoretically analyzed.Then,both common and improved ECF jet generators with less defects and good appearance are fabricated successfully based on MEMS technology.Finally,the experiments for the comparative verification of common and improved ECF jet generators are performed.The experimental results show that the ECF jet generators with bypass micro-channel have a stronger output performance,which verifies the feasibility of our design.%针对现有电共轭流体射流发生器(普通型)在微小流量输出情况下出现的严重压降问题,结合电流体动力学中离子拖曳泵送和传导泵送的运行机制,理论上解析了压降问题产生的原理,基于此,在普通型射流发生器的基础上设计了一种带有旁路微流道的改进型射流发生器.采用蒸镀、UV-LIGA、RIE等MEMS制造技术成功制作出了形貌质量俱佳的普通型和改进型射流发生器,并利用输出性能测量实验开展了对比验证.实验结果证明了通过在主流道侧添加旁路微流道来解决射流发生器的压降问题,并借此来提高其输出能力的可行性.