基于差动电容传感器的微动定位系统设计

摘要

A simple and compact micro-drive positioning system is designed and manufactured,and the system is of high precision,wide scanning scope and low cost.The mechanical structure of the system is designed with spring structure,and driven by piezoelectric ceramics,and the differential capacitance sensor is taken as displacemen feedback to achieve closed loop control,which effectively compensates the hysteresis and creep of piezoelectric ceramic actuator.The structure of the system and the working principle of the detection circuit are introduced,and the test and calibration for the system are carried out.The experiment results indicate that the micro-drive positioning system can achieve a scanning scope of 15 μm with a resolution of about 15 nm,and the dynamic performance is fine.%设计并加工了一种结构简单、小巧的微动定位系统,该系统精度较高、扫描范围大且成本低廉.采用簧片结构设计系统的机械结构,使用压电陶瓷作为执行器件,使用差动电容传感器作为位移反馈,实现闭环控制,从而有效克服了压电陶瓷执行器件的迟滞和蠕变效应.介绍了微动定位系统的机械组成和差动电容传感器信号检测电路的工作原理,并对系统进行了测试和标定实验.实验结果显示:该平台能够实现15 μm的扫描,精度约为15 nm,且动态性能良好.