为了改善MEMS超级电容器膜电极的致密性，通过在聚吡咯（ PPy）中引入苯磺酸钠（ BSNa）和氧化石墨烯（ GO）表面改性功能薄膜，实现聚吡咯薄膜在MEMS超级电容器三维微结构上的均匀沉积．借助扫描电镜（ SEM）、循环伏安测试（ CV）、交流阻抗谱测试（ EIS）、恒流充放电测试（ CP ）等手段对表面改性后的样品进行电化学性能测试．结果表明：当吡咯单体（Py）与BSNa摩尔比为1∶2，GO含量为0．4％时，在－0．4～1．0 V电压范围内，以100 mV／s速率扫描56圈，PPy薄膜的致密性最佳；表面改性可以在很大程度上减轻PPy颗粒的团聚，使得聚合后的PPy分子链排布紧密，形成了规整的网状立体结构；在放电电流为2 mA时，比容量可以达到13．3 mF／cm2，MEMS超级电容器的电化学性能得到改善．%In order to improve the compactness of film electrode for the MEMS supercapacitor, modified PPy film is deposited uniformly on the three⁃dimensional MEMS surpercapacitors structure by adding quantitative benzenesulfonate ( BSNa) and graphene oxide ( GO) into the electrolyte. The electrochemical performances of the modified samples are tested and analyzed by scanning electron microscopy ( SEM ) , cyclic voltammetry ( CV) , electrochemical impedance spectroscopy( EIS) and constant current charge⁃discharge test ( CP ) . The results show that the uniform and dense modified PPy film can be fabricated by the cyclic voltammetry in the voltage range of -0.4 ~ 1.0 V, with the scan rate of 100 mV /s and the scan lap of 56, when the ratio of Py to BSNa is 0. 5 and the content of GO is 0. 4wt%. It is observed by SEM that modification can reduce the agglomeration of PPy particles largely, so that PPy molecular chain arranged closely after polymerization to form a regular three⁃dimensional mesh structure. The capacitance of the samples is up to 13. 3 mF/cm2 at a discharge current of 2 mA by the constant current charge⁃discharge test and the electrochemical properties of MEMS surpercapacitors is obviously improved.
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