陶瓷激光精密打孔工艺研究

摘要

In the paper, a pulse Nd∶YAG laser was used to dr ill AL2O3 ceramic, discussed the effects of the laser energy, laser pulse wi dth, repeat frequency, focus setting etc parameters on the laser drilling qualit y.%用脉冲Nd:YAG激光对氧化铝(AL2O3)陶瓷基片进行了激光打孔试验,分析了激光能量、激光脉宽、脉冲频率、离焦量等工艺参数对成孔质量的影响.