激光诱导等离子体加工石英微通道的损伤模型

摘要

利用调Q的Nd:YAG激光器输出的纳秒激光脉冲诱导等离子体加工石英微通道,加工深度可达4.2mm,通道内壁光滑.本文对激光脉冲与物质相互作用的移动损伤模型进行了研究,建立了适用于纳秒激光脉冲诱导等离子体加工石英微通道的损伤模型,利用损伤模型分析了通道特点,模型结果与实验结果基本相符.%A Q-switched Nd:YAG laser is used to fabricate micro channels in a 1 cm3 fused silica substrate. The workis done by laser-induced plasma. The interior wall of the micro channels is smooth and the depth of the channels is upto 4.2 mm. The model of moving breakdown induced by laser pulses is set up and analyzed. The model can be used topredict the breakdown of micro channels fabricated by laser-induced plasma with nanosecond Nd:YAG laser pulses.The model can also be used to analyze the channel characteristics. The model conforms to the experimental resultswell.