飞秒激光加工光波导的工艺与传输特性研究

摘要

In this paper,optical waveguides were written by transverse scan of femtosecond laser.Scattered light meas-urement method was used to measure waveguide transmission loss.In order to improve the transmission performance of optical waveguide,the influence of focusing lens,processing speed and energy of the different numerical aperture on the transmission loss of optical waveguides was analyzed.Experimental results show that,when the numerical aperture of the focusing lens is 0.25 ,the laser power is 6 mW,processing speed is about 45 ~60μm/s,the transmission loss of written optical waveguide is below -0.2 dB/cm.%利用飞秒激光横向直写方式加工光波导，采用散射光测量法分析了光波导的传输损耗。为了提高光波导的传输性能，分析了不同数值孔径的聚焦物镜、加工速度和加工能量对光波导传输损耗的影响。实验结果表明，聚焦物镜数值孔径为0.25，激光功率为6 mW，加工速度在45～60μm／s时，飞秒激光加工的光波导具有较好的传输性能，其传输损耗低于－0.2 dB／cm。