室温相变氧化钒薄膜的制备及其C O2激光毁伤试验

摘要

The technology of laser protection using the phase transition properties of vanadium oxide has become a re-search focus.Vanadium oxide thin film was fabricated on ordinary glass substrates by direct current (DC)magnetron sputtering from a vanadium metal target and subsequent annealing.The phase transition of the film was observed by measuring its resistance-temperature (R-T)characteristic curve.Continuous CO2 laser with a power of 8.9 W and a spot diameter of 4.4 mm was used to irradiate on both bare glass disc and glass disc covered with vanadium oxide film to do damage experiments.The data indicated that the film had a semiconductor-metal phase transition temperature of about 30 °C,the bidirectional reflectance of the film before and after the phase transition were 1 3.48% and 76.4%respectively,and the bare glass disc broke down after irradiated for 7.5 s while the glass disc with vanadium oxide film remained unbroken for 38 s.This results show that the fabricated sample has the ability of laser protection because of its high reflectance after the phase transition.%军事目标的抗强激光毁伤是亟待解决的热点难点问题，利用氧化钒的相变特性进行激光防护是当前这一领域的热点之一。本文采用直流磁控溅射加后续热处理的方法在普通玻璃基底上制备了氧化钒薄膜，通过测量其电阻温度特性曲线来观测其相变特性，并利用功率为8.9 W、光斑直径为4.4 mm的二氧化碳连续激光分别照射用作基底的普通玻璃和制备的相变氧化钒薄膜样品进行激光毁伤试验。试验数据显示该薄膜的相变温度约为30°C，薄膜的双向光谱反射率在相变前后分别为13.48％和76.4％，用作基底的玻璃在激光照射7.5 s后破碎，而制备的薄膜样品在照射38 s后才破碎。这表明本文制备的室温相变氧化钒薄膜在相变后具有高反射特性，从而具有一定的抗强激光毁伤能力。