摆臂式干涉仪光程差扫描模型及其仿真

摘要

为实现摆臂式干涉仪光程差（OPD ）随时间的线性变化，需要摆臂式干涉仪作变速摆动。为此，在分析摆臂式干涉仪光程扫描系统组成的基础上，对干涉仪的电气特性进行了研究，在saber软件中建立了摆臂式干涉仪光程差扫描模型。为验证模型的正确性，将PID算法应用到摆臂干涉仪模型仿真中，研究了干涉仪系统的单位阶跃响应，确定了摆臂式干涉仪PID控制算法的各项参数。仿真结果表明，该模型可用于模拟摆臂式干涉仪光程差扫描过程，能够为干涉仪扫描控制系统的设计提供参考。%In order to make the optical path difference of the swing arm interferometer to change linearly with time,the swing velocity of the swing arm interferometer must be nonlinearly varied.Based on the analysis of the optical path difference(OPD)scanning system with the swing arm interferometer,the electrical characteristics of this interferome-ter are studied,and the OPD scanning simulation model of the interferometer is established by the saber software.To verify the OPD scanning simulation model,the PID algorithm is used for the simulation of this model,and the PID pa-rameters are determined by studying the unit step response of the swing arm interferometer.The results show that this simulation model works well in the process of the OPD scanning,and it can provide a reference for the interferometer optical path difference scanning system design.