有机聚合物光波导制作工艺综述

摘要

The organic polymer optical waveguide interconnects become the best solution to realize short distance com-putation and communication design.Short distance optical interconnection is the direction of future interconnects,and excellent comprehensive performance of polymer multimode optical waveguide is an important component in optical in-terconnection.The fabrication process of organic polymer optical waveguide has important influence on the performance of optical waveguide,therefore the fabrication process of organic polymer optical waveguide is summarized,and puts forward some own ideas.%有机聚合物光波导光互连已成为实现短距离计算通信设计目标的最佳解决方法。短距离光互连是未来互连方向，综合性能优良的聚合物多模光波导是光互连中的重要组成部分。有机聚合物光波导的制作工艺对光波导的性能具有重要影响，故此对有机聚合物光波导的制作工艺进行了综述，并提出了一些未来的研发方向。