基于纳米“金字塔”结构的光学抗反射特性技术研究

摘要

Pyramid is a typical kind of cone structure.When the light passes through the "pyramid" array,it is equivalent to pass through a thin film with a graded refractive index,and the Fresnel reflection at the interface is greatly weakened.The surface reflection characteristics of the sub-wavelength structure composed of three materials (Si,SiO2,Ge) were simulated with DiffractMOD in Rsoft.The results show that the sub-wavelength structure composed of SiO2 has good optical anti-reflection characteristics.%“金字塔”是一个典型的椎体结构,若将其尺寸缩小到纳米尺度并以面阵形式制作到界面上,光波经过该“金字塔”阵列时,等效为穿过一层折射率渐变的薄膜,在界面的菲涅尔反射将被极大削弱.通过基于严格耦合波的Rsoft软件中的DiffractMOD模块,分别对三种材料(Si,SiO2,Ge)构成的亚波长结构在中红外光波入射下的表面反射特性进行模拟研究.研究发现,SiO2材料构成的亚波长结构具有良好的光学抗反射特性.