在硅片切割过程中，为了降低加工成本，企业大都是利用回收砂浆进行切割硅片。随着切割工艺的成熟，在不影响硅片质量的前提下，降低生产成本已成为企业关注的焦点。本文关注的重点是在实际的工业生产中，不同比例回收砂浆对多晶硅片表面质量的影响；并提出为保证硅片的品质，切片企业使用回收砂浆的比例应维持在80%以下。在此基础上，分析了使用回收砂浆对企业降低生产成本所做的贡献。%In the wafer slicing process,the recycled slurries are used to cut silicon in order to re-duce the production cost by enterprises. Along with the cutting process,on the premise that the silicon quality is not affected,the cost reduction has become the focus of enterprises. The focus of this paper is in the actual industrial production,the effect of mixture ratio of recycling slurry on the surface qual-ity of silicon chip is discussed. In order to guarantee the silicon quality,it should be maintained below 80% to use recycled slurry ratio for slicing enterprises. In this paper,the effects of recycling slurry on the multi-wafer quality were reported.At the same time,the cost reduction due to recycle slurries were also analyzed.
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