Oriented Growth of PZT thick film embedded with PZT nanoparticles

摘要

This paper reports that dense and crack-free(100)oriented lead zirconate titanate(Pb(Zr0.52Ti0.48)O3,PZT)thick film embedded with PZT nanoparticles has been successfully fabricated on Pt/Cr/SiO2/Si substrate by using PT transition layer and PVP additive.The thick film possesses single-phase perovskite structure and perfectly(100)oriented.The(100)orientation degree of the PZT films strongly depended on annealing time and for the 4 μm-thick PZT film which was annealed at 700 ℃ for 5 min is the largest.The(100)orientation degree of the PZT thick film gradually strengthen along with the thickness of film decreasing.The 3 μm-thick PZT thick film which was annealed at 700 ℃ for 5 min has the strongest(100)orientation degree,which is 82.3%.