提出采用新型阴极多自由度运动电沉积技术制作纳米结构模塑成型镍模板,研究不同流场分布状态下电沉积成型模板的厚度分布、表面质量和纳米结构成型精度.研究结果表明:阴极定轴转动可使其表面流体流动增强,但对电解液的整体搅拌作用较弱,需辅助高压空气搅拌等措施以增强传质效果;阴极水平往复运动对电解液整体搅拌作用较强,但阴极表面电铸液流动性较差,上部区域存在流动死角;当阴极定轴旋转转速为150 r/min,水平往复移动速度为250 mm/s时,镀层厚度偏差可分别降低至17.26%和20.93%;运动阴极电沉积制得的镍模板表面气孔缺陷明显减少,纳米结构的复制精度显著提高,可应用于纳米结构模塑成型工艺.%The cathode multi-DOF motion electrodeposition technology was introduced to fabricate high quality nickel nano-molding stamps. The stamps were electrodeposited at different fluid field distributions, and their thickness uniformity, surface quality and accuracy of nanostructures were studied. The results show that the rotating cathode can increase solution flow on the cathode surface but not for the whole electrolyte. An assistant agitation method such as air stirring should be applied. Reciprocating moving cathode has better effect on agitating the whole electrolyte but it leads to a weak flow on the cathode surface. When cathode rotates at 150 r/min and moves at speed of 250 mm/s, the thickness variation reaches 17.26% and 20.93%, respectively. The surface quality and accuracy of the nanostructures of the electrodeposited stamps are significantly improved. The electrodeposited stamp can be applied in the nano-molding progress.
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