高精度微位移传感器是表面计量技术的关键技术之一.文中介绍了一种低成本、高精度的接触式微位移传感器.该传感器采用平行簧片实现精密直线运动,相位透射型正弦衍射光栅作为计量光栅实现高精密的位移测量.文中分析了其测量原理、光学原理、干涉条纹的光电接收以及辨向、细分.理论分析和实验应用结果表明该传感器垂直分辨率可达到nm级,测量量程为2 mm,可以用于微纳米表面形貌和轮廓的测量.%High-precision micro displacement sensor is one of the key technologies of the surface metrology. A low cost,high precision contact micro displacement sensor was presented and developed. Its precise linear motion was implemented by parallel springs and its high precise displacement measurement was realized by transmission sine phase diffraction grating. The measurement principle, optical principle, the detection of interference fringes and their discerning direction, subdivision were analyzed. The theoretical analysis and the experimental results indicate that the vertical resolution of the sensor can achieve nanometric level and its measurement range can reach 2 mm. So that it can be applied in measurement of micro-nano surface topography.
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