基于随机衰退过程的生产线动态维护建模

摘要

以半导体生产线的多设备串行生产模型为研究对象，在保证整体系统运行平稳的情况下，建立了系统的定点维护成本分析模型并提出一种新的生产线维护策略。根据串联随机衰退系统的特点，提出一种基于故障阈值的视情维护的建模方法。应用可动态修正的Weibull分布对各设备的随机衰退过程进行建模，通过仿真建立各检测点维护成本分析模型，并验证所提出的维护决策方法的有效性。实验结果表明，该方法效果良好，维护策略具有可操作性，为设备维护提供了理论支撑。%A production model of semiconductor production line with multiple devices in a serial is selected as the research object.Ensuring the stability of the whole system, a maintenance cost analysis model is es-tablished and a new maintenance strategy of production line proposed.According to the characteristics of series stochastic recession system, a modeling method based on fault threshold is put forward.The equip-ment stochastic recession is modeled using Weibull with varied parameters.A maintenance cost analysis model is established, and the proposed maintenance decision method is verified.Experimental results show that the dynamic maintenance model is effective and the equipment maintenance strategy is practical, which can provide strong theoretical support for the maintenance of actual equipment.