三氯氢硅建设项目污染源分析与控制

摘要

三氯氢硅是制备多晶硅的重要原料，三氯氢硅极易挥发，在空气中易燃，并能与空气形成爆炸混合物，其化学性质很不稳定，遇水或水蒸气发生剧烈的放热反应，形成有毒的腐蚀性氯化氢烟雾；通过对三氯氢硅建设项目工艺流程及产污环节分析，探讨了该类项目生产过程废气、废水、噪声、固体废物等污染物的种类、成分及产生量，在此基础上提出了相应的污染控制措施，对该类项目环境影响评价工作有一定的指导作用。%As an important raw material for polycrystalline silicon, trichlorosilane is highly volatile, extremely flammable in air, even explosive when mixed with air. The chemical properties of trichlorosilane are unstable, having exothermic reaction withwater or vapor and forming poisonous and corrosive fog. Through analysis on technological process and pollution generation links of trichlorosilane project, this paper discusses the pollution categories, components and amounts of waste gas, waste water, noise,solid waste etc. in a bid to put forward corresponding measures for pollution prevention and provide reference to environmental im- pact assessment of trichlorosilane projects.