四连杆摇摆结构的金刚石线切割设备切割硅材料的研究

摘要

A diamond wire saw cutting equipment based on the four connecting rod swing structure is designed,expounded the structure of the equipment composition and cutting way.Conducting the silicon slice experiment which is based on swing cutting and traditional linear cutting,the experiment shows that it can significantly reduce the loss of diamond wire,enhances the stability of cutting using swing cutting slice method;Then the silicon shape cutting experiment is carried out,The experiment studies the feasibility of silicon shape cutting,and puts forward problems which needs a further study.%设计了一种四连杆摇摆结构的金刚石线切割设备，阐述了该设备的结构组成与切割方式。进行了基于摇摆切割方式及传统直线方式的硅材料切片实验。结果表明：摇摆切割可明显降低金刚石线损耗，提高切割稳定性。同时进行了硅材料形状切割实验，研究了硅材料形状切割的可行性，提出了下一步需要研究的问题。