化学机械抛光304不锈钢用抛光液成分研究

摘要

304 stainless steel will become one of the main materials of flexible display substrate due to its excellent characteristics.In order to improve the rate and quality of chemical mechanical polishing of 304 stainless steel,the influences of different oxidants on material removal rate and surface roughness under different mass concentration or volume concentration and pH value are mainly studied.The results show that the oxidants of Fe2O3,H2O2,and FeCl3 achieved the best polishing effects in pH=2, and that KMnO4achieved the best polishing effect in pH=10.The best surface roughness is 4 nm when the volume concentration of H2O2 is 10 mL/L,and the highest material removal rate is 209 nm/min when the mass concentration of FeCl3 is 4.0 g/L at their optimum pH.%由于304不锈钢的优良特性,未来其将成为柔性显示器衬底的主要材料之一.为提高304不锈钢化学机械抛光的速率和质量,研究不同氧化剂在不同质量浓度或体积浓度及不同 pH 值下,对材料去除率和表面粗糙度的影响.结果表明:氧化剂 Fe2O3、H2O2、FeCl3都在 pH=2时抛光效果最佳,氧化剂KMnO4在pH=10时抛光效果达到最佳.在最佳的 pH 值下进行抛光,H2O2的体积浓度为10 mL/L时,表面粗糙度Ra最好,为4 nm;在FeCl3质量浓度为4.0 g/L时,材料去除率最高,为209 nm/min.