High Temperature Oxidation as a Production Route for Electronic Materials

摘要

Oxidation of metallic components often results in degradation and structural failure,prevention is therefore an important topic.On the other hand,oxidation process creates new products such as metal oxides,can be used as a production route.A well-known process in semiconductor industry is that oxidation in dry or wet atmosphere is a popular way for growth of multi-functional SiO_2 films on Si wafers. Recently,oxidation processes under controlled conditions(atmosphere,temperature,and time) are used to prepare various oxides,carbides,or nitrides with micro-/nano-struetures,well-defined composition,dimension, shape and properties.The use of oxidation now includes thin film and nano-/micro-sized devices, and porous oxides for sensing and catalysis purposes.This paper introduces the research activities in the authors' group on applications of oxidation as a tool for synthesis of functional materials.