Institute of Physics;
University of Sao Paulo;
Sao Paulo;
Brazil;
Polytechnical School;
University of Sao Paulo;
Sao Paulo;
Brazil;
Nissin Electric Company;
Ltd.;
Kyoto;
Japan;
MEMS Development Department;
Semiconductor Division;
OMRON Corporation;
Shiga;
Japan;
Carbon Nitride; Magnetron Sputtering; X-Ray Photoelectron; Raman Scattering;