阳极氧化Ti3SiC2制备纳米孔阵列

摘要

以NH4F和乙二醇为电解液，采用阳极氧化法在Ti3SiC2表面制备纳米多孔结构，研究阳极氧化电压、电解液浓度和氧化时间对纳米多孔结构形成的影响。利用场发射扫描电子显微镜(FE-SEM)、X射线衍射仪(XRD)和X射线光电子能谱(XPS)对纳米多孔结构进行表征。结果表明：孔径随着氧化电压的升高而增大，且延长氧化时间有利于制备孔径均匀的纳米孔；Ti3SiC2试样经阳极氧化后除含有Ti、Si、C元素外，还含有O元素，且以TiO2的形态存在。%Nanopore arrays were fabricated on the surface of Ti3SiC2 in ethylene glycol and NH4F electrolyte by anodic oxidation. The influences of anodizing potential, concentration of the electrolyte and anodizing time on the micrograph of the nanopore arrays were investigated. The morphology, size and composition of nanopore arrays were characterized by field-emission scanning electron microscopy (FE-SEM), X-ray diffractometry (XRD) and X-ray photoelectron spectroscopy (XPS). The results show that the average hole diameter increases with the increase of anodizing voltage and the deviation of the hole diameter reduces with extending anodizing time. In addition to containing Ti, Si, C element, Ti3SiC2 sample contains O element that exists in the form of TiO2.