一种Intrabay物料运输系统的多目标实时调度方法

摘要

为了提高晶圆制造Intrabay物料运输系统(简称Intrabay系统)的多目标调度性能,提出了一种基于模糊逻辑-匈牙利方法的Intrabay系统多目标实时调度方法.该方法实时响应运输小车空载和晶圆卡请求运输等动态事件,并对各事件时刻的Intrabay系统调度子问题进行多目标优化求解.采用300mm的晶圆制造系统数据进行仿真实验并与传统的Intrabay系统调度方法进行比较,结果表明该方法在Intrabay系统和晶圆加工系统的多个指标综合性能方面优于传统Intrabay系统调度方法,验证了Intrabay系统多目标实时调度方法的有效性.%To obtain better multi objective comprehensive performances of the Intrabay material handling systems in semiconductor wafer fabrication systems (SWFSs), a fuzzy logic and Hungarian algorithm based dispatching approach was proposed. The approach responsed the system's dynamic e-vents such as vehicle idling and wafer lot requiring for handling in real -time, and then solved scheduling sub-problems of Intrabay material handling system in the moments corresponding to these dynamic events. With experimental data from an Intrabay material handling system of 300mm SWFSs, it is demonstrated that the proposed approach has better multi -objective comprehensive performances than both the traditional first encounter first served (FEFS) rule and the highest priority (HP) first served rule based dispatching approaches for Intrabay material handling systems.