流化床-化学气相沉积技术的应用及研究进展

摘要

Fluidized bed-chemical vapor deposition (FB-CVD) is widely used in industrial production owing to the combined advantages of both fluidized bed and chemical vapor deposition. Providing good heat and mass transfer,it can obtain a pure product with uniform deposition. Based on its basic principle,the applications of FB-CVD in areas of particle coating,preparation of one-dimensional nano-materials, polycrystalline silicon,powder synthesis and powder surface modification are reviewed. The progress of process simulation and reactor structure design of FB-CVD is introduced. From the discussion,the scientific connotation of FB-CVD shows multi-scale features,namely material preparation at microscopic level, particle fluidization at mesoscopic level and reactor structure design at macroscopic level. Future development of FB-CVD technology depends on coupling analysis of these three scales,and research should be focused on the effect of interaction between different scales,such as coupling between homogeneous nucleation material/non-homogeneous nucleation in materials preparation and particle fluidization in the reactor.%流化床-化学气相沉积（FB-CVD）技术是一种多学科交叉的材料制备技术，兼有流化床传热传质性能良好以及化学气相沉积均匀、产物单一等优点，在工业生产中有着广泛的应用，但因其属于交叉学科，散见于各种研究，没有进行专门的进展评述。本文拟对 FB-CVD 的工业应用进行专题综述，分析其发展和研究趋势。首先探讨了 FB-CVD 的基本原理，分别综述了其在颗粒包覆、一维纳米材料、多晶硅制备、颗粒表面改性及粉体制备等方面的应用，介绍了 FB-CVD 的过程模拟及反应器结构优化方面的研究进展。通过以上讨论，梳理了FB-CVD研究的科学内涵。可以看出，该过程具有明显的多尺度特征，即材料制备的微观层次、颗粒流化均匀性的介观层次以及反应器结构设计的宏观尺度。总结得出：FB-CVD技术的未来发展取决于3个尺度的耦合分析，其研究重点也应关注尺度间的相互影响效应，如材料制备的均相成核、非均相成核和颗粒流化及运动规律的相互耦合等。