With the advantages of high precision and great environmental adaptability, laser heterodyne interferometry has been successfullyused in some areas, such as measuring distance and angle and other point detection. The Hertz-level frequency-shifting technology greatly improves the accuracy and stability of surface measurement and extends its appli-cation to the areas of array detection,such as three-dimensional topography measurement,smooth surface measurement, digital holography, speckle measurement, etc. The frequency difference of heterodyne interferometry is realized by acousto-optic frequency shifter under the control of two radio frequency signals each with a fixed frequency value. How-ever, a deviation of the real value from the design value of frequency always exists, which is referred to as frequency difference deviation. It causes the heterodyne frequency and the frame rate of the array detector to be unable to be strictly matched, thus affecting the improvement of measurement accuracy. According to the theory of full-field het-erodyne measurement, we derive the relationship between frequency difference deviation and measurement accuracy of the heterodyne measurement instrument,and analyze the effects of relevant parameters including the value of frequency difference,frequency deviation,initial sampling time,initial phase,sampling frequency,and sampling cycles on measure-ment accuracy. A method of improving the measurement accuracy is proposed by reasonably selecting the sampling time and frame number. Analysis shows that the initial sampling time and initial phase have the same effect on the measure-ment accuracy. With the reasonable choosing of measurement parameters and processing methods, the measurement accuracy of the instrument could be greatly improved. In addition,the peak value of full-field heterodyne measurement error is linearly related to the frequency difference deviation. In the case of a certain frequency difference deviation,the instrument could achieve a higher measurement accuracy with greater frequency difference,but requires a higher frame rate of detector at the same time. As a result, designers should choose an appropriate value of frequency difference for measurement instrument. Furthermore,increasing the sampling frequency could also improve the measurement accuracy. Actually,if sampling frames are more than fifteen in a single cycle,the improvement of measurement accuracy would be limited. Multi-period sampling has little effect on measurement error caused by frequency difference deviation,and the measurement error is the limiting value of measurement accuracy that the instrument could reach. Therefore,this study could be used as a theoretical basis of the design and parameter selection and also the measurement accuracy analysis for full-field heterodyne measurement instrument development.%根据全视场外差测量的相关理论,推导了频差偏差与仪器测量精度的相互关系.分析了频差大小、频差偏差、采集初始时间、初始相位、采样频率和采样周期数等相关参数对测量精度的影响.研究结果可以作为全视场外差测量设备设计、参数选取的理论依据;并给出了通过合理选择采样时间和采样帧数提高测量精度的一种方法.
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