首页> 外文学位 >Molecular precursors to solid-state materials: I.~Thermolysis of alkoxides containing M triple bond M centers (M = molybdenum and tungsten). II.~Construction of a remote plasma enhanced chemical vapor deposition (RPECVD) facility

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Molecular precursors to solid-state materials: I.~Thermolysis of alkoxides containing M triple bond M centers (M = molybdenum and tungsten). II.~Construction of a remote plasma enhanced chemical vapor deposition (RPECVD) facility

机译：固态材料的分子前体：I.〜含M个三键M中心（M =钼和钨）的醇盐的热解。 II。〜远程等离子体增强化学气相沉积（RPECVD）设施的建设

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作者
DiStasi, Vincent Frank;
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作者单位

Indiana University;

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授予单位 Indiana University;
学科
学位 Ph.D.
年度 1993
页码 137 p.
总页数 137
原文格式 PDF
正文语种 eng
中图分类
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2. Synthesis and evaluation of kappa(2)-beta-diketonate and beta-ketoesterate tungsten(VI) oxo-alkoxide complexes as precursors for chemical vapor deposition of WOx thin films [J] . Bonsu Richard O., Bock Duane C., Kim Hankook, Dalton transactions: An international journal of inorganic chemistry . 2016,第27期

机译：合成和评估的Kappa（2）-β-二酮和β-酮酸酯钨（VI）氧代醇盐配合物作为WOx薄膜化学气相沉积的前体
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Molecular precursors to solid-state materials: I.~Thermolysis of alkoxides containing M triple bond M centers (M = molybdenum and tungsten). II.~Construction of a remote plasma enhanced chemical vapor deposition (RPECVD) facility

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