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A quantitative study of the microstructure and crystallographic fiber texture in nickel electrodeposits used in radio-frequency MEMS switches, including a new transmission electron microscopy (TEM) technique for polycrystalline films

机译：定量研究射频MEMS开关中使用的镍电沉积层的微观结构和结晶纤维质地，包括一种用于多晶膜的新型透射电子显微镜（TEM）技术

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作者
Cantwell, Patrick R.;
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作者单位

Purdue University;

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授予单位 Purdue University;
学科
学位 Ph.D.
年度 2011
页码 273 p.
总页数 273
原文格式 PDF
正文语种 eng
中图分类
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A quantitative study of the microstructure and crystallographic fiber texture in nickel electrodeposits used in radio-frequency MEMS switches, including a new transmission electron microscopy (TEM) technique for polycrystalline films

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