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Surface acoustic wave filters on diamond layered structures.

机译:金刚石层状结构上的表面声波滤波器。

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摘要

Surface acoustic wave (SAW) devices are an enabling technology for high-performance wireless communication systems. They are able to meet performance specifications that are beyond the scope of competing technologies, particularly in the front-end of the receivers, and establish the ultimate performance that is achievable. Current spectrum congestion is forcing a move to higher operating frequencies, and this is leading to a search for low-cost SAW devices that are able to operate at frequencies above 2 GHz. To this end, there has been considerable interest in devices that employ the high acoustic velocity of diamond. Diamond, however, is not piezoelectric, and it must be layered with other materials such as zinc oxide (ZnO) to permit the electrical generation and detection of acoustic waves. There is therefore a need for modeling tools that accurately predict the behaviour of multi-layered SAW substrates in the presence of surface transducers and reflectors.; This Thesis presents a study of SAW propagation and generation under infinite periodic grating structures on multi-layered ZnO/Diamond substrates. The study is based on the space harmonic method (SHM) and predicts the SAW behaviour under both open and shorted surface electrodes. Dispersion diagrams are obtained around the first Bragg wavenumber and stopbands of finite bandwidth are observed. The method is then extended to the generation of SAWS by interdigital transducers. Admittance curves and static capacitances are calculated. The physical propagation behaviour of ZnO/Diamond multi-layered substrates is also investigated. The displacement distributions and the standing wave patterns are calculated within each layer. The energy contained in each layer is computed for different propagation modes and different ZnO layer thicknesses.; The results are interpreted within the framework of the coupling-of-modes (COM) theory. The COM parameters are derived for the first and second Sezawa modes as a function of aluminum and zinc oxide thicknesses. The results and the COM parameters can be directly used in the design of SAW devices. The established analytical treatments can be easily applied to other multi-layered substrates with an arbitrary configuration including additional layers.
机译:表面声波(SAW)设备是用于高性能无线通信系统的一项启用技术。它们能够满足超出竞争技术范围的性能规格,特别是在接收机的前端,并建立可达到的最终性能。当前的频谱拥堵迫使人们不得不转向更高的工作频率,这导致人们开始寻找能够在2 GHz以上的频率下工作的低成本SAW设备。为此,人们对采用金刚石的高声速的装置非常感兴趣。但是,钻石不是压电的,它必须与其他材料(例如氧化锌(ZnO))叠层,以产生电能并检测声波。因此,需要在表面换能器和反射器存在的情况下能准确预测多层SAW衬底行为的建模工具。本文研究了多层ZnO /金刚石衬底上无限周期光栅结构下声表面波的传播和产生。这项研究基于空间谐波法(SHM),并预测了表面电极开路和短路下的表面声波行为。在第一个布拉格波数附近获得色散图,并观察到有限带宽的阻带。然后,该方法扩展到由叉指式换能器生成SAWS。计算导纳曲线和静态电容。还研究了ZnO /金刚石多层基板的物理传播行为。在每个层内计算位移分布和驻波图。对于不同的传播模式和不同的ZnO层厚度,计算每个层中包含的能量。在模式耦合(COM)理论的框架内解释了结果。对于第一和第二Sezawa模式,根据铝和氧化锌的厚度推导出COM参数。结果和COM参数可以直接用于SAW器件的设计中。所建立的分析处理可以容易地应用于具有包括附加层的任意配置的其他多层基板。

著录项

  • 作者

    Kitabayashi, Hiroyuki.;

  • 作者单位

    McMaster University (Canada).;

  • 授予单位 McMaster University (Canada).;
  • 学科 Engineering Electronics and Electrical.
  • 学位 Ph.D.
  • 年度 2001
  • 页码 143 p.
  • 总页数 143
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 无线电电子学、电信技术;
  • 关键词

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