An energetic approach for the evaluation of adhesion of sputter deposited TiC films on glass by the scratch test

摘要

Scratch testing has been employed for the adhesion evaluation of sputter deposited Ti+C thin films of various carbon contents on glass substrates. These films showed various friction coefficients and the friction coefficient was found to affect the scratch test results. We took into account the frictional force and the internal stress in the adhesion evaluation. It was found that both of these parameters affected considerably the scratch test results and they should surely be considered in the adhesion evaluation. We have estimated adhesion energies of the Ti+C films, and these were found to range from 0.7 to 2.1 J/m~2 depending on the carbon content in the film.