Kinetics of Radicals in Fluorocarbon Plasmas for Treatment of Polymers

摘要

In recent years, fluorocarbon plasmas have been extensively used for the treatment of polymer surfaces in an increasing number of applications. A decrease of the surface wettability is observed after exposue of the polymer to the discharge, to a degree depending on the treatment time and idscharge parameters. Fluorination of the ploymer surface, following exposure of the surface to the discharge, is beliieved to be the result of functionalization and/or polymerization, depending on the plasma composition. However, due to the complexity of the chemical reactions both in the gas phase and at surfaces, the underlying mechanisms are not yet well understood.