Plasma Modification at Atmispheric Pressure

摘要

Many useful processes for treating solid surfaces can be carried out by plasma methods. However, most previous work was done at low pressure, usually less than a few torr. For such low pressure processes, the vacuum apparatus requires great cost and is not suitable or the treatments of large cscale substrates such as long film rolls. We previously reported that surface fluorination and thin film deposition could be carried out with the atmosp heric pressure glow plasma(APG0 process(1). This approach can reduce apparatus costs and can also be applied ot high vapor pressure substances such as gum, textiles and biomaterials. In this article, we will discuss the mechanism of stabilization of glow plasma at atmospheric pressure and report examples of applications of this technology.