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EXTENDED ABSTRACT FREE VIBRATION AND STABILITY ANALYSIS OF A SPINNING ANNULAR CIRCULAR PLATE

机译:纺丝环形圆板的扩展抽象自由振动及稳定性分析

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In this paper, Rayleigh Ritz method has been applied to investigate the vibration and stability of a rotating annular circular plate with attached point masses. The classical plate theory assumptions have been used to calculate the strain energy and kinetic energy. The coordinate functions are combinations of polynomials , which satisfy boundary conditions at the outer boundary. The frequency speed diagram is obtained for (0,0) vibration mode. The plate is assumed to be spinning and the initial stress fields in the plate are derived assuming the plane stress condition. The problem is of practical importance in many engineering applications, e.g. silicon wafers used for LSI chips are produced by slicing the cylindrical crystal ingot with a disk like tool which is free along the inside hole and clamped at the outer radius. It has been shown that mode (0,0) correspond to two modes at frequencies f1 and f2. Mode f2 experiences a flutter type of instability after the critical speeds. The critical speeds are independent of attached point masses but depend upon the inner radius and bending rigidity of the plate. With increase in bending rigidity, critical speeds increase. For a low bending rigidity of plate of D=0.18e4, f2 mode meets f1 mode and makes the f1 mode unstable and the corresponding rotational speed of the plate is dependent on inner radius. With increase in inner radius, this rotational speed decreases.
机译:本文已经应用Rayleigh Ritz方法来研究旋转环形圆形板的振动和稳定性。经典板理论假设已被用于计算应变能量和动能。坐标函数是多项式的组合,其满足外边界处的边界条件。获得(0,0)振动模式获得频率速度图。假设板被旋转,并且假设平面应力条件衍生板中的初始应力场。这些问题在许多工程应用中具有实际重要性,例如,用于LSI芯片的硅晶片通过用圆柱形晶格与圆盘状工具切割,圆柱形晶锭,其自由沿内孔自由夹紧并夹在外半径。已经表明,模式(0,0)对应于频率F1和F2处的两种模式。模式F2经历临界速度后的颤动类型的不稳定性。临界速度与附着点质量无关,但取决于板的内半径和弯曲刚度。随着弯曲刚度的增加,临界速度增加。对于D = 0.18E4的板的低弯曲刚度,F2模式符合F1模式,使F1模式不稳定,并且板的相应旋转速度取决于内半径。随着内半径的增加,这种转速降低。

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