Optimizing design of a new micro-structural gas sensor

摘要

A new kind of electrode was designed for micro-structural gas sensor based on silicon substrate. The temperature distribution was simulated by means of finite element analysis tool ANSYS, in order to obtain higher temperature and uniform temperature distribution in the micro-gas sensor, the thickness of SiO_2, thickness of Si substrate, electrode width and electrode space is designed to be 50, 250, 10 and 350 urn, respectively.