Nanocrystalline Optomechanical Cavity Excited by Surface Acoustic Wave Launchers

摘要

A platform to integrate electromechanical excitation to optomechanical components is developed. The material for the optomechanical cavities is nanocrystalline silicon, and the electromechanical transducing exploits surface acoustic waves coupling to the optomechanical cavities. The platform facilitates integration of optomechanical devices with CMOS and silicon photonics technologies.