Multi-cantilever array sensor system with MOEMS read-out

摘要

Sensor systems relying on multi-cantilever deflection (as operation principle of optical detection) currently available, face general functionality constrains following the complexity of the system and its cost. Several laser sources as well as big sized detectors are needed to record the signal from each cantilever separately. This paper presents an innovative approach for integration of the MOEMS sensor system embarrassing micro-mirrors, optical elements, dedicated electronics with position sensitive detector (PSD) to allow large cantilever arrays the sensing by application of a single laser source and a compact PSD. The general system overview is presented in this paper along with exemplary representative measurement results from multi-cantilever arrays gathered for various resonant modes recorded for each cantilever.