Learning MEMS Design, Simulation and Fabrication Through 3-D Printing

摘要

This paper presents a cost-effective learning tool for modeling and simulating the microfabrication process and design aspects of MEMS devices using three-dimensional (3-D) printing. This approach was developed to provide engineering educators a more affordable method for teaching MEMS modeling in settings without a cleanroom. In this approach, by designing and building the MEMS prototypes, the engineers learn by experiencing the process of building a MEMS device from the specifications given. For these prototypes 3-D printers, including the Makerbot Replicator 2X and Stratasys Dimension 1000, are used to create scaled-up models of MEMS devices, specifically a MEMS capacitive switch, MEMS inductor and an MEMS optical switch. Realistic components of MEMS fabrication including conformal layer coating, release etch holes and 3-D printer resolution limitations are part of the design considerations..