New Multi-drum Web Coaters for Sputtering Deposition

摘要

On the basis of multiannual experience in the works of Sidrabe, Inc. with web coaters a series of multi-drum vacuum machines of magnetron and reactive magnetron sputtering has been created. The offered design provides compensation of the web size changes, measurement of resistance and optical characteristics of the deposited layers after each deposition zone, good vacuum isolation of the compartments etc. The machines of the described type are used for the deposition Cr + Cu, ITO, SiO_2 and other multi-layer coatings, including AR layer systems.