Factory Automation as an Enabler in Leading-Edge Semiconductor Manufacturing

摘要

Key innovations in factory automation systems have enabled many millions of leading-edge products to be developed and ramped at very high yields and speed in multiple factories in a very short time. These include fully automated operations which have been deployed pervasively, manufacturing, engineering and cycle-time breakthroughs, and automated process control and analysis capabilities that enable the output and quality predictability needed when manufacturing highly complex products on such a large scale. The talk will also discuss use of common platforms for rapid automation solutions deployment across the manufacturing chain, and cover the use of modeling and machine learning techniques that are used extensively to optimize development and manufacturing.