High-bandwidth Nano-Positioning Modules for High-throughputMicro/Nano Manufacturing

摘要

This paper presents the design of a one dimensional high-bandwidth nano-positioning module using hybridcompliant-notch flexure-based structures. The parallelogram hybrid compliant-notch flexure enables simultaneouslyachieving a higher structure bandwidth and a smaller parasitic motion. An analytic analysis of the nano-positioningmodule is presented to fully explain the assumptions and parameters used in the design, and results from finiteelement analysis are also presented to demonstrate the effectiveness of this hybrid compliant-notch flexure overcommonly used compliant mechanisms and notch flexure structures, especially when the bandwidth needs to bescaled up for high throughput nanomanufacturing applications.