Spraying Using Electromagnetically Accelerated Plasma

摘要

In magneto-plasma-dynamic (MPD) arcjet generators, plasma is accelerated by electromagnetic body forces. Silicon nitride reactive spraying was carried out using an MPD arcjet generator with crystal silicon rods and nitrogen gas. Because higher-velocity, higher-temperature and higher-density and larger-area plasmas are produced with the MPD arcjet generator than those with conventional thermal plasma torches, nitriding of silicon can be enhanced. A dense and uniform β-Si_3N_4 coating with 30 μm in thickness was formed after 200 shots at a repetitive frequency of 0.03 Hz with a discharge current of 9 kA and a substrate temperature of 700 ℃. The Vickers hardness reached about 1300. Furthermore, silicon carbide and aluminum nitride sprayings were conducted with some spraying systems. All results showed that the MPD arcjet generator had high potentials for spraying.