LIFETIME OF NONEQUILIBRIUM CARRIERS IN AlGaN EPILAYERS WITH HIGH Al MOLAR FRACTION

摘要

AlGaN epilayers with different aluminum content have been studied by photoluminescence (PL) and light-induced transient grating (LITG) techniques. The epilayers were grown by conventional metal organic chemical vapor deposition (MOCVD) and by migration enhanced MOCVD (MEMOCVDTM). The carrier lifetime and PL intensity in epilayers containing the same amount of aluminum are shown to be inversely proportional to the dislocation density, which was determined using etch pit technique. The carrier diffusion length is shown to be close to the average distance between two first-neighbor dislocations. Enhancement of the lifetime and PL intensity in epilayers grown on sapphire by MEMOCVDTM is demonstrated.