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Top-Gate Graphene-on-UNCD Transistors with Enhanced Performance

机译:性能增强的Top-Gate石墨烯-UNCD晶体管

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摘要

We fabricated a number of top-gate graphene field-effect transistors on the ultrananocrystalline diamond (UNCD) - Si composite substrates. Raman spectroscopy, scanning electron microscopy and atomic force microscopy were used to verify the quality of UNCD and graphene device channels. The thermal measurements were carried out with the "hot disk" and "laser flash" methods. It was found that graphene on UNCD devices have increased breakdown current density by ~50% compared to the reference devices fabricated on Si/SiO_2. The relatively smooth surface of UNCD, as compared to other synthetic diamond films, allowed us to fabricate top gate graphene devices with the drift mobility of up to ~ 2587 cm~2V~(-1)s~(-1).
机译:我们在超纳米晶金刚石(UNCD)-Si复合衬底上制造了许多顶栅石墨烯场效应晶体管。拉曼光谱,扫描电子显微镜和原子力显微镜用于验证UNCD和石墨烯设备通道的质量。用“热盘”和“激光闪光”方法进行热测量。研究发现,与在Si / SiO_2上制造的参考器件相比,UNCD器件上的石墨烯的击穿电流密度提高了约50%。与其他合成金刚石薄膜相比,UNCD相对光滑的表面使我们能够制造漂移迁移率高达〜2587 cm〜2V〜(-1)s〜(-1)的顶栅石墨烯器件。

著录项

  • 来源
  • 会议地点 San Francisco CA(US);San Francisco CA(US)
  • 作者单位

    Nano-Device Laboratory, Department of Electrical Engineering and Materials Science and Engineering Program, University of California, Riverside, California 92521 USA;

    Nano-Device Laboratory, Department of Electrical Engineering and Materials Science and Engineering Program, University of California, Riverside, California 92521 USA;

    Center for Nanoscale Materials, Argonne National Laboratory, IL, 60439 USA;

    Nano-Device Laboratory, Department of Electrical Engineering and Materials Science and Engineering Program, University of California, Riverside, California 92521 USA;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 半导体技术;
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