Spectrally Selective Emitters with Deep Rectangular Cavities Fabricated with Fast Atom Beam Etching

摘要

Spectral emittance and thermal stability of two-dimensional W surface gratings are investigated to obtain high-temperature resistive selective emitters for TPV applications. Numerical calculations based on rigorous coupled-wave analysis are performed to determine the structural profile of surface gratings. According to the determined parameters, W gratings composed of rectangular microcavities with the period of 1.0 μm are fabricated on single crystalline and polycrystalline W substrates by means of fast atom beam etching technique. The grating shows a strong emission peak which can be explained by the confined modes inside the cavities. The grating made from a single crystalline W shows very high thermal stability up to 1400K, while the polycrystalline grating is deformed at a high temperature because of the grain growth.