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Zinc(P) diffusion in In_(0.53)Ga_(0.47)As and GaSb for TPV devices

机译:TPV器件在In_(0.53)Ga_(0.47)As和GaSb中的锌(P)扩散

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摘要

The simultaneous diffusion of Zn and P into InGaAs and GaSb from a local vapour phase source was investigated. Zn diffusion allowed to form a TPV cells with p-layer (emitter) of 0.2-0.6 μm thickness without any additional post-diffusion operations. The penetration depth of Zn was determined by temperature and time of diffusion and was found to depend on defects and impurities at the InP/InGaAs heterointerfaces. This interface acts as a source of nonequilibrium neutral interstitials. We assume that the growth of thin undoped InP before the growth of InGaAs base region can decrease induced defects. This is recommended for an efficient suppression of the anomalous fast Zn diffusion. Doping profiles of the p-layers were obtained from the Raman spectra of the cell structure and by the Secondary Ion Mass Spectroscopy method. Good performance characteristics were demonstrated for InGaAs and GaSb TPV cells based on this technique.
机译:研究了Zn和P从局部气相源同时扩散到InGaAs和GaSb中的情况。锌扩散可以形成厚度为0.2-0.6μm的p层(发射极)的TPV电池,而无需任何其他扩散后操作。 Zn的渗透深度由温度和扩散时间决定,并且发现其取决于InP / InGaAs异质界面上的缺陷和杂质。此界面充当非平衡中性插页的来源。我们假设,在InGaAs基极区生长之前,薄无掺杂InP的生长可以减少诱发的缺陷。为有效抑制异常快速的Zn扩散,建议使用此方法。从电池结构的拉曼光谱和通过二次离子质谱法获得p层的掺杂分布。基于此技术,InGaAs和GaSb TPV电池表现出良好的性能特征。

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