MEMS and nano/bio technologies

摘要

Besides rapid commercialization, MEMS is contributing to expand scientific frontiers in nano-scale and bio technology. A pair of probes with 10-50 nm tip radius were micromachined with integrated microactuators. Field emission, tunneling current and atomic transport were investigated in the gap between probes facing each other. The configuration was also applied to obtain nano tweezers that handle DNA molecules. For bio assay of enzymes, MEMS chips with fL-chambers and micro heaters were fabricated in which the enzymatic product was evaluated in a single molecular level. In addition, a conveyance device driven by bio motor molecules (microtubules and kinesin) was demonstrated.