The manufacture of the nano V_1-x-y W_xSi_yO₂2 thin films for the uncooled IR detectors by the sol-gel method

摘要

Thermochromic properties of vanadium dioxide thin films are applied to bolometer materials for the uncooled microbolometer due to their high temperature coefficient of resistance (TCR) at room temperature. In this paper sol-gel method was used to manufacture the V _{1-x -y}W_xSi_yO₂ thin films and the quantities of the tungsten- and SiO₂-doped VO₂ thin films were determined by the design of experiments. V_{1-x -y} W_xSi_yO₂ thin films were deposited on a non-alkali glass substrate by the spin coating process. Then the thin films were calcined at 500degC under a reducing gas flow (H₂ -Ar, 5%-95%) in an atmospheric control furnace. The chemical stoichiometry of the films was characterized by the ESCA. AFM and XRD measurements were performed to study the surface morphology and the crystallinity. In addition, the optical and electrical properties of the thin films were measured by FTIR, UV-Vis Spectrometer, Ellipsometry and High Resistance Meter