Micromachined droplet on demand formation with shear mode piezoelectricity and micron size nozzles

摘要

A micromachined droplet formation by using shear mode piezoelectricity and micron size nozzles is presented. The poling design for the shear mode piezoelectric actuator is achieved by both the analysis and experiment. The nozzle plate with the micro-fluidic channel is fabricated by the COMS process and MEMS post-process. The pressure chamber, immersed micro-fluidic channel and the nozzle plate are fabricated on a single chip. The droplet-on-demand generator with the piezoelectric actuator and the nozzle located on one side of the chip offers planar assembly design for large quantity fabrication with high yield and low cost. The nozzles with diameter of 4 μm were fabricated and 1 μm nozzle behavior was analyzed. Design, analysis and measurements were presented.