The manipulation of nanocoils in a scanning electron microscope (SEM) for the assembly of nanoelectromagnets is demonstrated. Semiconductor/metal nanocoils were used in the manipulation process; however, the method is applicable for other nanocoil types. Techniques for assembling nanocoil-based electromagnets are developed. Releasing, sliding, and pick-and-place have been realized using a nanomanipulator, thus demonstrating the feasibility of constructing such a device. Electrical characterization has also been carried out through nanomanipulation. The potential performance of nanoelectromagnets is investigated through numerical simulation, in which flux densities and field gradients are estimated. Results from nanoassembly and simulation indicate that nanoelectromagnets are feasible. In nanoelectromechanical systems (NEMS) they can find applications for actuation of magnetic nanostructures, for sensing, and for electromagnetic wave absorption.
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