Full-Speed Simultaneous EBSD and Spectral Image EDS Acquisitions

摘要

Advances in x-ray microanalysis and backscatter electron diffraction instrumentation and software allow analysts to investigate crystalline materials at ever faster speeds. Using electron microscope chambers with ideal port geometries, where all detectors point at the same area of the tilted sample, it is possible to collect EBSD, EDS and WDS data simultaneously with no loss in acquisition performance. The increase in lab efficiency is remarkable.